Accession Number : ADP008068

Title :   Status of the Soft X-Ray/XUV Optical Metrology Program at the National Institute of Standards and Technology,

Corporate Author : NATIONAL INST OF STANDARDS AND TECHNOLOGY GAITHERSBURG MD

Personal Author(s) : Watts, Richard ; Ederer, David ; Lucatorto, Thomas ; Tarrio, Charles

Report Date : 05 MAR 1992

Pagination or Media Count : 2

Abstract : The National Institute of Standards and Technology (NIST) has initiated a program devoted to the characterization of soft x-ray optics at the wavelength of use. Although NIST has an operational XUV characterization facility which it is using to make measurements for users across the country, that facility suffers from several deficiencies that will limit its usefulness in the coming years. Therefore, we are constructing an improved monochromator/ reflectometer beamline that will upgrade and extend our XUV measurement capabilities. We will describe the optical properties of the new monochromator and discuss the state of the design of the the new reflectometer. The monochromator is based on a varied line spaced plane grating that uses simple optical elements in a fixed entrance slit/fixed exit slit geometry. Important features of the new instrument include high throughput, simple wavelength scanning resolutions in excess of 1000, and the ability to characterize large (in excess of 30 cm diameter) optical surfaces with small radii of curvature.

Descriptors :   *MEASUREMENT, *MONOCHROMATORS, *OPTICAL PROPERTIES, *OPTICS, *SOFT X RAYS, CURVATURE, DEFICIENCIES, DIAMETERS, EXITS, GRATINGS(SPECTRA), MIRRORS, GEOMETRY, METROLOGY, REFLECTOMETERS, SCANNING, STANDARDS, SURFACES, THROUGHPUT, X RAYS.

Subject Categories : Nuclear Physics & Elementary Particle Physics
      Optics
      Test Facilities, Equipment and Methods

Distribution Statement : APPROVED FOR PUBLIC RELEASE