Accession Number : ADP008137
Title : Micro-Mechanical Structures as Integrated Optical Sensor Elements,
Corporate Author : DELFT UNIV OF TECHNOLOGY (NETHERLANDS)
Personal Author(s) : Wu, S. ; Frankena, H. J.
Report Date : APR 1992
Pagination or Media Count : 2
Abstract : As optical channel waveguides and part of sensor circuits, micro-mechanical cantilevers and bridges have been fabricated upon Si substrates. The waveguides have a sandwiched layer structure of SiO(2)/Al(2)O(3)/SiO(2) and possess very good optical wave-guiding properties. Typical dimensions of such channel waveguides are 25-200 micron in length, 5-30 micon in width, about 2.5 micron in thickness and 10 micron in the separation distance between waveguide and substrate. Such micro-mechanical structures provide new possibilities to realize integrated optical transducer components for detecting force-related quantities such as sound, vibration and acceleration. Shifts at a cantilever's free end or bending of a bridge will change the out coupled beam in relation to the driving forces.
Descriptors : *OPTICAL WAVEGUIDES, *CANTILEVER BEAMS, SILICON DIOXIDE, ALUMINUM OXIDES, ACOUSTIC DETECTORS, ACCELEROMETERS, VIBRATION, CHANNELS, NETHERLANDS, TRANSDUCERS, SUBSTRATES.
Subject Categories : Optics
Distribution Statement : APPROVED FOR PUBLIC RELEASE