Accession Number : ADP008613

Title :   Design and Fabrication of VLSI Ferroelectric Liquid Crystal Spatial Light Modulators,

Corporate Author : COLORADO UNIV AT BOULDER DEPT OF ELECTRICAL AND COMPUTER ENGINEERING

Personal Author(s) : Jared, David A. ; Turner, Richard ; Johnson, Kristina M.

Report Date : 22 MAY 1992

Pagination or Media Count : 4

Abstract : This paper discusses several design and fabrication issues surrounding VLSI, ferroelectric liquid crystal (FLC) spatial light modulators (SLMs). These SLMs consist of a VLSI CMOS backplane and FLC modulators as shown. The FLC is sandwiched between the CMOS backplane and a sheet of glass coated with a transparent conductor. The design and fabrication issues that are described include: FLC material selection, alignment of the FLC, installation of the glass cover, and the design of photodetectors, amplifiers, and pad drivers. An electrically addressed dynamic RAM SLM with 64x64 pixels and three optically addressed SLMs with 32x32 pixels are described to discuss these issues.

Descriptors :   *LIGHT MODULATORS, *OPTICAL CIRCUITS, LIQUID CRYSTALS, VERY LARGE SCALE INTEGRATION, FERROELECTRIC CRYSTALS, METAL OXIDE SEMICONDUCTORS, PHOTODETECTORS, DESIGN CRITERIA, FABRICATION, PIXELS.

Subject Categories : Optics
      Electrooptical and Optoelectronic Devices

Distribution Statement : APPROVED FOR PUBLIC RELEASE