Accession Number : ADP010205

Title :   MEMS-Based Research in Integrated Monitoring and Actuation at Case Western Reserve University

Corporate Author : CASE WESTERN RESERVE UNIV CLEVELAND OH

Personal Author(s) : Huff, Michael A. ; Mehregany, Mehran

PDF Url : ADP010205

Report Date : APR 1996

Pagination or Media Count : 11

Abstract : The paper discusses the development of MEMS at CWRU for the active monitoring and control of systems or structures. The ultimate objective is the realization of high density array architectures of microfabricated sensors and actuators for distributed monitoring and control of a system, or its components. Our program addresses the research needs for the advancement of the technology toward realization of low cost, reliable, integrated sensor/actuator devices and arrays capable of real time signal processing and control. Our program is also addressing the need for high-temperature MEMS required for use in many aerospace, automotive, and industrial process control applications. Toward this goal, we have research and development activities in high temperature sensors and actuators made from silicon carbide (SiC), a wide bandgap semiconductor material capable of functioning in environments where the ambient temperature is well over 250 C, which is the limit of silicon devices. We are also investigating high-phase transformation temperature shape memory alloys as integrated actuation mechanisms suitable for various high temperature applications.

Descriptors :   *SYMPOSIA, INTEGRATED SYSTEMS, CONTROL SYSTEMS, MONITORING, REAL TIME, HIGH TEMPERATURE, ARRAYS, MICROELECTRONICS, ACTUATORS, SILICON CARBIDES.

Subject Categories : Electrical and Electronic Equipment
      Mfg & Industrial Eng & Control of Product Sys

Distribution Statement : APPROVED FOR PUBLIC RELEASE