Accession Number : ADP204489
Title : Micromachined Silicon Seismic Transducers,
Corporate Author : SANDIA NATIONAL LABS ALBUQUERQUE NM
Personal Author(s) : Barron, Carole C. ; Fleming, James G. ; Sniegowski, Jeffry J. ; Armour, David L. ; Fleming, R. P.
PDF Url : ADP204489
Report Date : 14 AUG 1995
Pagination or Media Count : 9
Abstract : Batch-fabricated silicon seismic transducers could revolutionize the discipline of CTBT monitoring by providing inexpensive, easily deployable sensor arrays. Although our goal is to fabricate seismic sensors that provide the same performance level as the current state-of-the-art 'macro' systems, if necessary one could deploy a larger number of these small sensors at closer proximity to the location being monitored in order to compensate for lower performance. We have chosen a modified pendulum design and are manufacturing prototypes in two different silicon micromachining fabrication technologies. The first set of prototypes, fabricated in our advanced surface-micromachining technology, are currently being packaged for testing in servo circuits - we anticipate that these devices, which have masses in the 1-10 ug range, will resolve sub-mG signals. Concurrently, we are developing a novel mold micromachining technology that promises to make proof masses in the 1-10 micro g range possible - our calculations indicate that devices made in this new technology will resolve down to at least sub-micro G signals, and may even approach the 10(exp -10) G/Hz acceleration levels found in the low-earth noise model
Descriptors : *MACHINING, *SEISMIC DETECTION, *ARMS CONTROL, *TRANSDUCERS, *NUCLEAR EXPLOSION DETECTION, DATA PROCESSING, SYMPOSIA, MONITORING, ACCELEROMETERS, UNDERGROUND EXPLOSIONS, FABRICATION, SEISMIC DATA, SILICON, CIRCUITS, SEISMIC DISCRIMINATION, TREATIES, EARTHQUAKES, MICROMECHANICS, SERVOMECHANISMS, MINIATURIZATION, SEISMOMETERS.
Subject Categories : Government and Political Science
Mfg & Industrial Eng & Control of Product Sys
Seismic Detection and Detectors
Computer Programming and Software
Distribution Statement : APPROVED FOR PUBLIC RELEASE